Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 763 - 772
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 744 - 762
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 616 - 625
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 695 - 704
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 511 - 521
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 679 - 694
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 570 - 576
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 539 - 546
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 597 - 609
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 577 - 587
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 547 - 554
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 715 - 724
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 522 - 530
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 555 - 569
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 705 - 714
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 641 - 651
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 652 - 659
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 531 - 538
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 725 - 735
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 626 - 640